3 results
Efficient TCAD Model for the Evolution of Interstitial Clusters, {311} Defects, and Dislocation Loops in Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 994 / 2007
- Published online by Cambridge University Press:
- 21 April 2011, 0994-F10-01
- Print publication:
- 2007
-
- Article
- Export citation
Modeling Dislocation Loop Nucleation and Evolution in Germanium, Arsenic and Boron Implanted Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 717 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, C5.9
- Print publication:
- 2002
-
- Article
- Export citation
Modeling Threading Dislocation Loop Nucleation and Evolution in MeV Boron Implanted Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 669 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, J4.4
- Print publication:
- 2001
-
- Article
- Export citation